Title:
プラズマエッチング処理方法
Document Type and Number:
Japanese Patent JP3748068
Kind Code:
B2
Inventors:
Ryoji Fukuyama
Yutaka Omoto
Mizumura Tsushin
Yutaka Omoto
Mizumura Tsushin
Application Number:
JP2002107255A
Publication Date:
February 22, 2006
Filing Date:
April 10, 2002
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
C23F4/00; H01L21/3065
Domestic Patent References:
| JP49036120B1 |
Foreign References:
| WO2001003179A1 |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office
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