Title:
薄膜形成装置および搬送方法
Document Type and Number:
Japanese Patent JP3751246
Kind Code:
B2
Abstract:
A center robot is fixed approximately in a central portion of a process part. A coating unit, a drying unit, a transfer unit, a peeling unit, a film supplying unit and a reversing unit are arranged around the center robot. The center robot comprises a hand-for-substrate and a hand-for-film which are allowed to directly access the respective units. Within a process part, the center robot transports a sheet film and/or a substrate between the coating unit, the drying unit, the transfer unit and the film supplying unit, and a thin film is formed on the substrate using the sheet film.
Inventors:
Hideki Adachi
Application Number:
JP2001347427A
Publication Date:
March 01, 2006
Filing Date:
November 13, 2001
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/285; B32B38/18; H01L21/31; H01L21/00; H01L21/283; H01L21/677; H01L21/687; H01L21/768
Domestic Patent References:
| JP10144664A | ||||
| JP11040642A | ||||
| JP2000031071A | ||||
| JP2001135634A | ||||
| JP2000068293A | ||||
| JP5152266A |
Attorney, Agent or Firm:
Kakusho Shoichi
Ryose Uji
Ryose Uji