蒸発源製造方法および真空蒸着方法 - Mitsubishi Electric Corporation

Title:

蒸発源製造方法および真空蒸着方法

Document Type and Number:

Japanese Patent JP3752894

Kind Code:

B2

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Inventors:

Ishikawa Miki
Izumi Mikami

Application Number:

JP16495099A

Publication Date:

March 08, 2006

Filing Date:

June 11, 1999

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

C23C14/24; G02B5/08

Domestic Patent References:

Attorney, Agent or Firm:

Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka

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