Title:
プラズマ処理方法及びその装置
Document Type and Number:
Japanese Patent JP3753194
Kind Code:
B2
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Inventors:
Takeshi Miyashita
Katsuhiro Takahashi
Hiroo Miyajima
Koji Aoki
Kurashina Osamu
Yoshiaki Mori
Katsuhiro Takahashi
Hiroo Miyajima
Koji Aoki
Kurashina Osamu
Yoshiaki Mori
Application Number:
JP34732695A
Publication Date:
March 08, 2006
Filing Date:
December 14, 1995
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L21/3065; H05H1/46; C23C16/50; C23F1/00; C23F4/00; H01L21/302
Domestic Patent References:
| JP5235520A | ||||
| JP7211492A |
Attorney, Agent or Firm:
Inoue Ichi
Yukio Fuse
Mitsue Obuchi
Yukio Fuse
Mitsue Obuchi
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