小型テラヘルツ放射源

Japanese Patent JP3792126

B2

A miniaturized terahertz radiation source based on the Smith-Purcell effect is provided, in which, from a focused electron source, a high-energy bundle of electrons is transmitted at a defined distance over a reflection diffraction grating composed of transversely disposed grating rods, so that, in response to oscillating image charges, electromagnetic waves of one wavelength are emitted, the wavelength being adjustable as a function of the periodicity of the lines and of the electron velocity. The elements of the radiation source, such as field emitter ( 1 ), electrostatic lens ( 4 ), beam deflector ( 5 ), grating ( 7 ) of metal, and a second anode ( 8 ), are integrated on a semiconductor chip using additive nanolithographic methods. The field electron source is constructed to project, as a wire, out of the surface, using additive nanolithography, and is made of readily conductive material having stabilizing series resistance. The wire is constructed, using computer-controlled deposition lithography, in a straight or curved, free-standing design. In its surface area, the base material bears a conductor structure for the electrical terminals and connections ( 2 ), including controllable voltage sources ( 3 ) for supplying the field emitter tips ( 1 ), lens ( 4 ), and control electrodes ( 5, 8 ). The terahertz radiation source is designed to be a powerful component that is available in modular form and is usable in any spatial situation.

Coups, hans, ve, pee
Bauer, Tobias
Elsessel, Wolfgang
Floreani, Philip
Rothkos, Hartmut

JP2000620708A

July 05, 2006

May 10, 2000

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Navotech Game Beher

H01J1/304; H01S3/30; H01J3/02; H01J25/00; H01S3/09

JP2001504991A
JP6508474A

Schoessler C et.al.,,Nanostructured integrated electron source,J. Vac. Sci. Technol. B,1998年,Vol.16 No.2,p.862-865

Masatake Shiga

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