Title:
感放射線性樹脂組成物、パターン状樹脂膜を有する基板の製造方法、及び該樹脂組成物の利用
Document Type and Number:
Japanese Patent JP3843995
Kind Code:
B2
Inventors:
Junji Koidemura
Hirokazu Higashi
Hirokazu Higashi
Application Number:
JP2004507917A
Publication Date:
November 08, 2006
Filing Date:
May 27, 2003
Export Citation:
Assignee:
Zeon Corporation
International Classes:
G03F7/004; G03F7/022; H01L21/027; G03F7/038
Domestic Patent References:
| JP11258802A | ||||
| JP5165201A | ||||
| JP2001337448A | ||||
| JP2001188343A | ||||
| JP10307388A | ||||
| JP7234505A |
Attorney, Agent or Firm:
Shigeaki Nishikawa