Title:
測定装置における移動の切り離し及び測定のための装置及び方法
Document Type and Number:
Japanese Patent JP3860121
Kind Code:
B2
Abstract:
A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.
Inventors:
Massie, James Are.
Prokush, Roger Bee.
Prokush, Roger Bee.
Application Number:
JP2002572344A
Publication Date:
December 20, 2006
Filing Date:
March 08, 2002
Export Citation:
Assignee:
Beco Instruments Incorporated
International Classes:
G01B11/00; G01B5/28; G01B21/00; G01B21/30; G01D5/26; G01Q10/02; G01Q10/04; G01Q30/06; G01Q30/20; G01Q70/02; G01Q60/00; G01Q90/00
Domestic Patent References:
| JP6180226A | ||||
| JP8105903A | ||||
| JP989910A | ||||
| JP2001183283A | ||||
| JP2001500958A |
Foreign References:
| US3283568 | ||||
| US5172002 | ||||
| US5196713 | ||||
| US5440920 | ||||
| US5714682 | ||||
| US5811802 | ||||
| US5949070 |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda