Title:
ガラス基板の熱処理装置
Document Type and Number:
Japanese Patent JP3911284
Kind Code:
B1
More Like This:
Inventors:
Naohiko Gen
Application Number:
JP2006282637A
Publication Date:
May 09, 2007
Filing Date:
October 17, 2006
Export Citation:
Assignee:
Kowa Co., Ltd.
International Classes:
C03B32/00; G02F1/13; H01J11/20; H01J11/22; H01J11/34; H05B3/06; H05B3/20; H05B3/72
Domestic Patent References:
| JP2000161858A | ||||
| JP2000286536A | ||||
| JP2000302485A | ||||
| JP9249426A |
Attorney, Agent or Firm:
Masanobu Kureda