Title:
電子線装置
Document Type and Number:
Japanese Patent JP3932894
Kind Code:
B2
Abstract:
An electron beam (4) to be irradiated onto a sample (10) is two-dimensionally scanned by a scanning coil (9), and secondary electrons generated from the sample (10) by the scanning are detected by a secondary electron detector (13). A deflection coil (15) for image shifting is used for electrically deflecting the primary electron beam to shift a field of view for image shift in an arbitrary direction by an arbitrary amount. By the image shift, the primary electron beam (4) to be irradiated onto the sample is energy dispersed to degrade the resolution. However, an ExB field producer (30) for dispersion control gives the primary electron beam energy dispersion in the opposite direction and having the equal magnitude. Therefore, the energy dispersion produced in the primary electron beam by the image shift is automatically corrected.
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Inventors:
Mitsugi Sato
Hideo Tosho
Hideo Tosho
Application Number:
JP2001535207A
Publication Date:
June 20, 2007
Filing Date:
October 29, 1999
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/147; G01N23/00; G01Q30/02; H01J37/05; H01J37/153; H01J37/28
Domestic Patent References:
| JP63231853A | ||||
| JP61078040A | ||||
| JP4328232A | ||||
| JP2001015055A |
Attorney, Agent or Firm:
Yukihiko Takada
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