Title:
導波管構造体およびその製造方法
Document Type and Number:
Japanese Patent JP3954105
Kind Code:
B2
Abstract:
A waveguide structure is fabricated by patterning active elements on a semiconductor wafer (21). The upper surface of the wafer (21) and the active elements are then coated by a dissolvable positive resist polymer. The polymer is etched using conventional techniques to produce a former for the structure of die waveguide channel and subsequently the polymer former is coated (26) and electroformed (27) using a suitable metallic material. Finally, the polymer former is dissolved leaving an open channel (25) the boundaries of which are defined by the electroformed stucture. The waveguide structure has the advantage that die active elements are integral with the waveguide structure and lie in a common fabrication plane which means that if the depth of the waveguide varies the active elements remain in the same plane. The waveguide structure is particularly suited for use at terahertz frequencies.
Inventors:
Man, Christopher
Application Number:
JP52911497A
Publication Date:
August 08, 2007
Filing Date:
February 14, 1997
Export Citation:
Assignee:
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCILS
International Classes:
H01P3/12; H01P11/00
Domestic Patent References:
JP88623A | ||||
JP1205606A | ||||
JP6387801A | ||||
JP62286301A | ||||
JP61238104A | ||||
JP6104615A | ||||
JP469902U | ||||
JP856118A | ||||
JP62220003A | ||||
JP563409A | ||||
JP6177648A | ||||
JP61141204A |
Foreign References:
US4480336 | ||||
US4641369 | ||||
US4811426 | ||||
US5540346 |
Other References:
William R.McGrath, Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies, IEEE MICROWAVE AND GUIDED WAVE LETTERS,VOL.3,No3, 1993年 3月
Attorney, Agent or Firm:
Michiteru Soga
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Masahisa Hase
Koji Fukui
Michiharu Soga
Yutaka Ikeya
Hidetoshi Furukawa
Suzuki Kenchi
Masahisa Hase
Koji Fukui