Title:
イオン移動度スペクトル分析法によりアルゴン中の窒素濃度を測定する方法
Document Type and Number:
Japanese Patent JP3964785
Kind Code:
B2
Abstract:
A method for carrying out nitrogen analysis by ionization mobility spectroscopy, at concentrations of few parts per billion (ppb) in argon is described. The method involves the addition of hydrogen in concentration of at least 5 ppb and lower than 100 parts per million (ppm) to the argon to be analyzed; the hydrogen addition step is possibly preceded by a purification operation of the argon flow, so as to reduce the total concentration of impurities other than nitrogen under 1 ppb.
Inventors:
Pustella, Luka
Stimack, Robert
Bonucci, Antonio
Switch, marco
Stimack, Robert
Bonucci, Antonio
Switch, marco
Application Number:
JP2002542862A
Publication Date:
August 22, 2007
Filing Date:
November 08, 2001
Export Citation:
Assignee:
Saes Getters Sochieta Per Azioni
International Classes:
G01N27/62; C01B23/00; G01N27/64; G01N33/00
Foreign References:
| US5457316 | ||||
| US5902561 |
Other References:
E.J.Hunter,et.al.,“Detection of trace nitrogen in bulk argon using proton transfer reactions”,Jouenal of Vacuum Science & Technology. A.Vacuum, Surfaces and Films,1998年,Vol.16, No.5,pp.3127-3130
D Nevejans,et.al.,“CAMAC-controlled system for the measurement of ion mobilities”,Journal of Physics E,1978年,Vol.11, No.9,pp.955-959
D.W.Fahey,et.al.,“Mobilities of N+ ions in helium and argon”,Journal of Chemical Physics ,1981年,Vol.74, No.3,pp.2080-2081
D Nevejans,et.al.,“CAMAC-controlled system for the measurement of ion mobilities”,Journal of Physics E,1978年,Vol.11, No.9,pp.955-959
D.W.Fahey,et.al.,“Mobilities of N+ ions in helium and argon”,Journal of Chemical Physics ,1981年,Vol.74, No.3,pp.2080-2081
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama