Title:
回路パターン露光用光学系
Document Type and Number:
Japanese Patent JP3976083
Kind Code:
B2
Inventors:
Akira Fujinoki
Hiroyuki Nishimura
Hiroyuki Nishimura
Application Number:
JP9023297A
Publication Date:
September 12, 2007
Filing Date:
March 25, 1997
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
G02B13/24; H01L21/027; G02B1/02; G03F7/20
Domestic Patent References:
| JP9006009A | ||||
| JP9012323A | ||||
| JP5088089A | ||||
| JP8107060A | ||||
| JP3088742A | ||||
| JP8005801A |
Attorney, Agent or Firm:
Masahisa Takahashi
Jiro Nagaya
Jiro Nagaya