Title:
アームアクセス位置検出方法及び真空処理装置
Document Type and Number:
Japanese Patent JP3977485
Kind Code:
B2
Abstract:
In an arm access position sensing method according to the present invention, optical sensors are provided in a cassette chamber. An adjusting cassette holding wafers W in the top slot and bottom slot is placed on a stage in the cassette chamber. The stage is movable. In a calibration process, the reference slot position, map position, and map thickness are calculated using optical sensors. Similarly, in a mapping process, the sampling thickness and map wafer offset value of each slot in the cassette holding the wafers W are calculated. In an arm access position sensing process, the access position of the transfer arm is calculated using the sampling thickness, map wafer offset value, reference slot position, map position, map thickness, and specific values. On the basis of the access position, the transfer arm and stage are actuated to transfer the wafer W.
Inventors:
Shigeru Ishizawa
Keiichi Matsushima
Keiichi Matsushima
Application Number:
JP12331997A
Publication Date:
September 19, 2007
Filing Date:
April 24, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; G05B19/401; H01L21/68
Domestic Patent References:
| JP1315156A | ||||
| JP4107841A | ||||
| JP1248634A | ||||
| JP6252246A | ||||
| JP7201951A | ||||
| JP7280512A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara