研磨方法及び研磨装置 - 東京エレクトロン株式会社

Title:

研磨方法及び研磨装置

Document Type and Number:

Japanese Patent JP3982900

Kind Code:

B2

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Inventors:

Kiyota Kurita

Application Number:

JP9816598A

Publication Date:

September 26, 2007

Filing Date:

March 27, 1998

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

B24B53/017; H01L21/304

Domestic Patent References:

JP9285955A

Attorney, Agent or Firm:

Nobuo Kono

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