Title:
ばら物の真空成膜装置
Document Type and Number:
Japanese Patent JP3989553
Kind Code:
B2
Abstract:
A device for vacuum coating bulk material includes a rotating holder for accommodating the bulk material, a plasma coating source arranged within the rotating holder, as well as a device, arranged within the rotating holder, for cleaning the bulk material using plasma. During the coating process, the rotational speed of the rotating holder is less than the speed necessary for producing a centrifugal force for fixing the bulk material against the inner wall of the rotating holder. The plasma coating source and the plasma cleaning device are arranged in such a way that their spheres of action overlap.
Inventors:
Kurt Burger
Johannes Voigt
Wolfgang Reuters
Johannes Voigt
Wolfgang Reuters
Application Number:
JP53216397A
Publication Date:
October 10, 2007
Filing Date:
February 27, 1997
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
C23C14/02; C23C14/22; C23C14/34; H01J37/34
Domestic Patent References:
| JP7506575A | ||||
| JP58136701A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Reinhard Einsel