Title:
シリコン単結晶成長方法
Document Type and Number:
Japanese Patent JP3991813
Kind Code:
B2
Inventors:
Isamu Miyamoto
Hideki Fujiwara
Hideki Fujiwara
Application Number:
JP2002245053A
Publication Date:
October 17, 2007
Filing Date:
August 26, 2002
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/22
Domestic Patent References:
| JP2002187796A | ||||
| JP11079883A | ||||
| JP11322492A | ||||
| JP2001130995A | ||||
| JP11209197A | ||||
| JP2000044387A |