Title:
高周波受動素子
Document Type and Number:
Japanese Patent JP3993172
Kind Code:
B2
Abstract:
An insulator layer is fabricated that is composed of a large number of insulating ridges formed with predetermined mutual spacing on a Si substrate. Then, an inductor conductor layer is formed in a spiral or swirl pattern on the insulator layer. An outgoing wiring conductor layer is provided between the Si substrate and the insulator layer, while a via hole is provided in the insulator layer immediately under the center-side end portion of the spiral or swirl of the inductor conductor layer, so that the center-side end portion of the spiral or swirl of the inductor conductor layer is connected to the outgoing wiring conductor layer through the via hole.
Inventors:
Makioka Toshifumi
Application Number:
JP2004006705A
Publication Date:
October 17, 2007
Filing Date:
January 14, 2004
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01F17/00; H01L21/822; H01L21/02; H01L23/522; H01L27/04; H01L29/00; H01L27/08
Domestic Patent References:
| JP2003045989A | ||||
| JP2003017485A | ||||
| JP2001196542A | ||||
| JP9036312A | ||||
| JP10065110A |
Attorney, Agent or Firm:
Akio Miyai