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Title:
化学増幅型ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP3994680
Kind Code:
B2
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Inventors:
Yasunori Uetani
Yamada Airi
Yoshiko Miya
Takayuki Yoshida
Application Number:
JP2001104302A
Publication Date:
October 24, 2007
Filing Date:
April 03, 2001
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; C08F220/18; C08F220/28; C08F222/04; C08F232/04; C08K5/00; C08K5/17; C08L33/06; C08L33/14; C08L35/00; C08L45/00; H01L21/027
Domestic Patent References:
JP2001142213A
JP2000159758A
Attorney, Agent or Firm:
Takashi Kuboyama
Toru Nakayama



 
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