酸化物超電導導体の製造装置

Title:

酸化物超電導導体の製造装置

Document Type and Number:

Japanese Patent JP3995772

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a manufacturing device for an oxide superconductor which controls the temperature of a substrate in a heating region within a temperature range suitable for film formation and which can manufacture an oxide superconductor having excellent superconductive properties uniform along the longitudinal direction and the width direction. SOLUTION: This manufacturing device for an oxide superconductor by sequentially depositing a crystallized thin film on a flexible tape-like substrate being moved inside a deposition chamber which can be vacuum evacuated and heat-treating the crystallized thin film is provided with a susceptor 32 having a curved face to touch the backside of the tape-like substrate and a heating jig comprising at least a heating means for heating the susceptor 32. The heating jig is so installed near the region where the crystallized thin film is deposited on the substrate as to bring the curved face 32a of the susceptor 32 into contact with the backside of the tape-like substrate and the curved face 32a of the susceptor 32 is curved in the directions along the longitudinal direction and also along the width direction of the substrate.

Inventors:

Mariko Hosaka
Yasuhiro Iijima
Takashi Saito
Toshiki Sadakata

Application Number:

JP29139597A

Publication Date:

October 24, 2007

Filing Date:

October 23, 1997

Export Citation:

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