Title:
単結晶引き上げ装置
Document Type and Number:
Japanese Patent JP3995863
Kind Code:
B2
Inventors:
Akira Higuchi
Keiichi Kusama
Tetsuya Kimura
Keiichi Kusama
Tetsuya Kimura
Application Number:
JP2000092920A
Publication Date:
October 24, 2007
Filing Date:
March 30, 2000
Export Citation:
Assignee:
Mitsubishi Materials Techno Co., Ltd.
International Classes:
C30B29/06; C30B15/30; H01L21/208
Domestic Patent References:
| JP9263487A | ||||
| JP62252396A | ||||
| JP2000095595A |
Attorney, Agent or Firm:
Tetsuo Yamazaki
Masatake Shiga
Masatake Shiga