Title:
整列装置およびそのような装置を含むリソグラフィー装置
Document Type and Number:
Japanese Patent JP3996212
Kind Code:
B2
Abstract:
An alignment device, for use in a lithographic apparatus, for aligning a first object, provided with a first alignment mark relative to a second object, provided with a second alignment mark, employs as a radiation source a laser which emits an alignment beam having a wavelength which is of the order of 1000 nm and to the order of 1100 nm.
Inventors:
Dailkusen, Peter
Neueus, Antonius, Maarten
Neueus, Antonius, Maarten
Application Number:
JP53468699A
Publication Date:
October 24, 2007
Filing Date:
December 07, 1998
Export Citation:
Assignee:
AS M Netherlands B. buoy.
International Classes:
H01L21/027; G03F7/20; G03F9/00; H01L21/68
Domestic Patent References:
| JP2283011A | ||||
| JP8139001A | ||||
| JP4330710A | ||||
| JP6134588A |
Foreign References:
| WO1997035234A1 |
Attorney, Agent or Firm:
Sakaki Morishita