Title:
ポッティング装置
Document Type and Number:
Japanese Patent JP3996787
Kind Code:
B2
Inventors:
Yoshihiro Tsubashi
Application Number:
JP2002035374A
Publication Date:
October 24, 2007
Filing Date:
February 13, 2002
Export Citation:
Assignee:
Athlete fa corporation
International Classes:
G01N21/956; H01L21/56
Domestic Patent References:
| JP5006913A | ||||
| JP5326588A | ||||
| JP2105550A | ||||
| JP3076783B2 |
Attorney, Agent or Firm:
Iat International Patent Business Corporation
Shuji Watanabe
Hiroshi Hasegawa
Shuji Watanabe
Hiroshi Hasegawa