Title:
電力用半導体装置
Document Type and Number:
Japanese Patent JP3998454
Kind Code:
B2
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Inventors:
Wataru Saito
Ichiro Omura
Ichiro Omura
Application Number:
JP2001335530A
Publication Date:
October 24, 2007
Filing Date:
October 31, 2001
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L29/47; H01L29/872; H01L21/8234; H01L27/04; H01L27/06; H01L29/06; H01L29/78
Domestic Patent References:
JP11274521A | ||||
JP6196683A | ||||
JP11214670A | ||||
JP61296760A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai