Title:
耐光性を改良したリソグラフィー用ペリクル
Document Type and Number:
Japanese Patent JP4000231
Kind Code:
B2
Inventors:
Ryo Shirasaki
Ikuo Sakurai
Shu Kashida
Ikuo Sakurai
Shu Kashida
Application Number:
JP6251399A
Publication Date:
October 31, 2007
Filing Date:
March 10, 1999
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F1/62
Domestic Patent References:
| JP9160222A | ||||
| JP7295207A | ||||
| JP3259258A | ||||
| JP4104155A |
Attorney, Agent or Firm:
Mikio Yoshimiya