Title:
結晶性珪素膜作製方法およびレーザー照射装置
Document Type and Number:
Japanese Patent JP4001645
Kind Code:
B2
Inventors:
Shunpei Yamazaki
Naoto Kusumoto
Toru Takayama
Masato Yonezawa
Naoto Kusumoto
Toru Takayama
Masato Yonezawa
Application Number:
JP32822395A
Publication Date:
October 31, 2007
Filing Date:
November 22, 1995
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/20; H01L21/268; H01L21/324
Domestic Patent References:
| JP6333823A | ||||
| JP6232068A | ||||
| JP7283151A | ||||
| JP5182919A | ||||
| JP7226373A | ||||
| JP4152624A | ||||
| JP7130668A |