To provide a manufacturing method of a holding tool by which lengths of a pair of arms can be accurately formed, to provide a manufacturing method of an actuator and to provide a manufacturing method of a slider unit.
The manufacturing method of the slider unit 1 comprizes a step for forming a pair of grooves 70 and 71 in opposite positions of both surfaces 61 and 62 of a first substrate 60, a step for joining second and third substrates 80 and 80 to both the surfaces in which the pair of grooves are formed, a step for forming the pair of arms 42 and 42 by etching the first substrate from an end part 60a of the first substrate to the position of the pair of grooves to expose the respective parts of the surfaces on the first substrate side of the second and the third substrates, a step for respectively providing piezo-electric elements 30 and 30 on the surfaces respectively opposite to the first substrate side of the second and the third substrates and a step for attaching a magnetic head slider 10 between the pair of arms.
COPYRIGHT: (C)2005,JPO&NCIPI
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Shiro Terasaki
Toyotaka Abe