Title:
多重角度および多重波長照射を用いるウェハ検査システムのためのシステムおよび方法
Document Type and Number:
Japanese Patent JP4001862
Kind Code:
B2
Abstract:
A method for detecting an anomaly on a top surface of a substrate comprises directing a first radiation beam having a first wavelength at the top surface of the substrate at a first angle measured from normal, and directing a second radiation beam having a second wavelength at the top surface of the substrate at a second angle measured from normal, wherein the second wavelength is not equal to the first wavelength. The method then comprises detecting scattered radiation from the first radiation beam and the second radiation beam to detect the presence of particles or COPs, and to differentiate between the two. Differences in the scattered radiation detected from the first radiation beam and from the second radiation beam provide the data needed to differentiate between particles and COPs.
Inventors:
Belark, steve
Stokkowski, Stanley E.
Vaes-Iravani, Medi
Stokkowski, Stanley E.
Vaes-Iravani, Medi
Application Number:
JP2003507532A
Publication Date:
October 31, 2007
Filing Date:
June 26, 2002
Export Citation:
Assignee:
KLA-Tenker Technology Corporation
International Classes:
G01N21/956; G01N21/47; G01N21/84; G01N21/88; G01N21/95; H01L21/66
Domestic Patent References:
| JP2000216208A | ||||
| JP2000352507A | ||||
| JP7270328A | ||||
| JP7128244A | ||||
| JP11237225A | ||||
| JP11237344A | ||||
| JP2000506275A |
Attorney, Agent or Firm:
Toshi Inoguchi