Title:
光照射装置およびこれを用いた転写加工装置
Document Type and Number:
Japanese Patent JP4003356
Kind Code:
B2
Inventors:
Tatsuya Yamamoto
Yoshio Saito
Yukio Sato
Yoshio Saito
Yukio Sato
Application Number:
JP27623199A
Publication Date:
November 07, 2007
Filing Date:
September 29, 1999
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02B5/32; G02B27/09
Domestic Patent References:
| JP7290264A | ||||
| JP6082845A | ||||
| JP8288211A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka