Title:
光の透過測定による試料の平坦度と複素誘電率測定装置及び測定法
Document Type and Number:
Japanese Patent JP4006525
Kind Code:
B2
Inventors:
Etsuo Kawate
Application Number:
JP2003391201A
Publication Date:
November 14, 2007
Filing Date:
November 20, 2003
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01B11/30; G01N21/35; G01N21/3563; G01N21/3581; H01L21/66
Domestic Patent References:
| JP2003525446A |
Other References:
S.E. Ralph 外3名,“Terahertz spectroscopy of optically thick multilayered semiconductor structures”,Journal of the Optical Society of America B,1994年12月,Vol.11, No.12,pp.2528-2532
E. Kawate 外1名,“Expanding optical measurement methods of thin films in the far-infrared towards the lower frequency region”,THz 2003: International Conference on Terahertz Electronics,2003年 9月,p.129
E. Kawate 外1名,“Expanding optical measurement methods of thin films in the far-infrared towards the lower frequency region”,THz 2003: International Conference on Terahertz Electronics,2003年 9月,p.129