Title:
バフロール式研磨装置におけるバフローラー
Document Type and Number:
Japanese Patent JP4007420
Kind Code:
B2
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Inventors:
Nobuhiko Suzuki
Application Number:
JP2002076623A
Publication Date:
November 14, 2007
Filing Date:
March 19, 2002
Export Citation:
Assignee:
Marugen Iron Works Co., Ltd.
International Classes:
B24B29/00
Domestic Patent References:
| JP63140358U | ||||
| JP63197047U | ||||
| JP49074594U | ||||
| JP10277916A | ||||
| JP49078895U |
Attorney, Agent or Firm:
Koji Kikkawa
Akiko Yoshikawa
Akiko Yoshikawa