Title:
パターン検査装置、パターン検査方法およびプログラム
Document Type and Number:
Japanese Patent JP4008291
Kind Code:
B2
Abstract:
An inspection apparatus ( 1 ) has an image pickup part ( 2 ) for performing an image pickup of a substrate ( 9 ), an operation part ( 4 ) to which an image signal is inputted from said image pickup part ( 2 ) and a computer ( 5 ), and the operation part ( 4 ) specifies an inspection image and a reference image from an object image acquired by the image pickup part ( 2 ). In the operation part ( 4 ), a region class to which each pixel of the specified inspection image belongs is specified on the basis of a corresponding pixel value of the reference image. In a comparator circuit of the operation part ( 4 ), a differential absolute value between each pixel of the inspection image and a corresponding pixel of the reference image is calculated and the differential absolute value is compared with a defect check threshold value in accordance with the specified region class, to perform defect check. The inspection apparatus ( 1 ) can thereby appropriately detect a defect in accordance with the region class to which each pixel belongs.
Inventors:
Hiroshi Asai
Yuichiro Hikita
Hiroyuki Onishi
Yuichiro Hikita
Hiroyuki Onishi
Application Number:
JP2002168054A
Publication Date:
November 14, 2007
Filing Date:
June 10, 2002
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01N21/956; G06K9/00; G06K9/46; G06T1/00; G06T7/00; H01L21/66
Domestic Patent References:
| JP2000113189A | ||||
| JP4310852A | ||||
| JP4316346A | ||||
| JP10171996A | ||||
| JP4078854A | ||||
| JP2000283929A | ||||
| JP5108800A |
Attorney, Agent or Firm:
Masahiro Matsusaka