Title:
塗布装置
Document Type and Number:
Japanese Patent JP4022282
Kind Code:
B2
Inventors:
木▲崎▼ 幸治
Yoshio Taniguchi
Kazuo Kise
Yoshio Taniguchi
Kazuo Kise
Application Number:
JP8813597A
Publication Date:
December 12, 2007
Filing Date:
April 07, 1997
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/16; H01L21/027; B05C11/08; B05D1/40
Domestic Patent References:
| JP7171479A | ||||
| JP8279448A | ||||
| JP59109273A | ||||
| JP7284715A | ||||
| JP7335532A | ||||
| JP8099057A | ||||
| JP8274014A |
Attorney, Agent or Firm:
Yukio Ono
Yoshio Miyagawa
Yoshio Miyagawa