スピン処理装置 - Shibaura Mechatronics Co., Ltd.

Title:

スピン処理装置

Document Type and Number:

Japanese Patent JP4025414

Kind Code:

B2

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Inventors:

Naoki Wajima
Akahara

Application Number:

JP8349198A

Publication Date:

December 19, 2007

Filing Date:

March 30, 1998

Export Citation:

Assignee:

Shibaura Mechatronics Co., Ltd.

International Classes:

B05C11/08; G03F7/30; H01L21/027; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai

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