Title:
半導体加速度センサ
Document Type and Number:
Japanese Patent JP4029453
Kind Code:
B2
Inventors:
Sadayuki Kado
Kani Mitsuhiro
Takamasa Sakai
Kani Mitsuhiro
Takamasa Sakai
Application Number:
JP1362598A
Publication Date:
January 09, 2008
Filing Date:
January 27, 1998
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
G01P15/12; G01P15/08; H01L29/84; H05K1/14; H05K1/18; H05K3/32
Domestic Patent References:
| JP4095740A | ||||
| JP7239235A | ||||
| JP8213500A | ||||
| JP8088244A | ||||
| JP3174756A | ||||
| JP6053289A | ||||
| JP62057394U | ||||
| JP60071162U |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori