Title:
成膜装置および成膜方法
Document Type and Number:
Japanese Patent JP4029624
Kind Code:
B2
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Inventors:
Noritaka Akita
Shinichi Ogura
Shinichi Ogura
Application Number:
JP2002032624A
Publication Date:
January 09, 2008
Filing Date:
February 08, 2002
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
C23C14/02; C23C16/02; G11B5/127; G11B5/187; G11B5/851
Domestic Patent References:
| JP2001085331A |
Attorney, Agent or Firm:
Fuyuki Nagai