Title:
縦型熱処理装置
Document Type and Number:
Japanese Patent JP4031601
Kind Code:
B2
Inventors:
Kazuaki Nishimura
Application Number:
JP28705499A
Publication Date:
January 09, 2008
Filing Date:
October 07, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; H01L21/22; C23C16/455
Domestic Patent References:
| JP10270453A | ||||
| JP6318556A | ||||
| JP2001102306A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka