Title:
荷電粒子ビーム装置
Document Type and Number:
Japanese Patent JP4032111
Kind Code:
B2
Inventors:
Okayama Shigeo
Application Number:
JP2001220685A
Publication Date:
January 16, 2008
Filing Date:
July 19, 2001
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01B15/00; H01J37/28; H01J37/12; H01J37/141; H01J37/317; H01L21/027
Domestic Patent References:
| JP51029091A | ||||
| JP56145640A | ||||
| JP7249393A | ||||
| JP11320123A |