Title:
レーザを用いた多結晶膜の製造方法
Document Type and Number:
Japanese Patent JP4034165
Kind Code:
B2
Inventors:
Oji Ichishima
Application Number:
JP2002314736A
Publication Date:
January 16, 2008
Filing Date:
October 29, 2002
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/20; H01L21/268
Domestic Patent References:
| JP2000058477A | ||||
| JP2001035806A | ||||
| JP2000286211A | ||||
| JP2000286195A | ||||
| JP2000260731A | ||||
| JP2001274088A | ||||
| JP2000505241A | ||||
| JP2001297983A | ||||
| JP10256178A |
Foreign References:
| US20020104750 |
Attorney, Agent or Firm:
Keishiro Takahashi
Mikio Kuruyama
Mikio Kuruyama