Title:
ステージおよびそれを用いた電子顕微鏡装置
Document Type and Number:
Japanese Patent JP4034179
Kind Code:
B2
Abstract:
To realize a stage for an electron microscope apparatus with small drift, and realize the electron microscope apparatus without any image escape caused by the drift and lowering of dimensional accuracy of measurement.
This electron microscope apparatus has a structure having a garter joint and a spring joint arranged in parallel at a jointing part of a transfer nut 5 and a table 3, and capable of impressing a thrust smaller than the maximum static friction force with good control after positioning. Furthermore, a drift speed detection circuit 54 and a drift servo circuit 55 are installed and a motor control is switched to the drift speed servo after completing the positioning.
COPYRIGHT: (C)2004,JPO&NCIPI
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Inventors:
Eiichi Seya
Application Number:
JP2002364930A
Publication Date:
January 16, 2008
Filing Date:
December 17, 2002
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20
Domestic Patent References:
| JP3102752A | ||||
| JP2002184339A | ||||
| JP2002367553A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation
Katsuo Ogawa
Kyosuke Tanaka
Katsuo Ogawa
Kyosuke Tanaka