Title:
レジスト剥離剤及びその使用方法
Document Type and Number:
Japanese Patent JP4035701
Kind Code:
B2
Inventors:
Ikemoto alone
Ryosuke Yamamoto
Hiroshi Yoshida
Maruyama Taketo
Ryosuke Yamamoto
Hiroshi Yoshida
Maruyama Taketo
Application Number:
JP2002066529A
Publication Date:
January 23, 2008
Filing Date:
March 12, 2002
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
G03F7/42; H01L21/027; H01L21/304
Domestic Patent References:
| JP6200296A | ||||
| JP7211707A | ||||
| JP8190205A | ||||
| JP8202051A | ||||
| JP8262746A | ||||
| JP8305040A | ||||
| JP9054442A | ||||
| JP2003013266A |
Attorney, Agent or Firm:
Takashi Nagai