Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4041676
Kind Code:
B2
Inventors:
Arai Masatoshi
Fumihiko Noro
Fumihiko Noro
Application Number:
JP2002028404A
Publication Date:
January 30, 2008
Filing Date:
February 05, 2002
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/8234; H01L27/04; H01L21/265; H01L21/316; H01L21/822; H01L27/06
Domestic Patent References:
| JP61078139A | ||||
| JP63202029A | ||||
| JP2001244345A | ||||
| JP62219625A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Teshima Masaru
Atsushi Fujita
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Teshima Masaru
Atsushi Fujita