半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー

Title:

半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー

Document Type and Number:

Japanese Patent JP4042244

Kind Code:

B2

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Inventors:

Tomonari Yoshiaki
Hitoshi Yoshida
Kamakura
Hiroshi Kawada
Kimito Saito
Kazuhiro Shintoki

Application Number:

JP4559299A

Publication Date:

February 06, 2008

Filing Date:

February 23, 1999

Export Citation:

Assignee:

MATSUSHITA ELECTRIC WORKS,LTD.

International Classes:

B25J7/00; B62D57/00; B25J19/00; B81B3/00; B81B5/00; F03G7/06; F16K31/02; F16K31/70; H01H37/14; H01H37/52

Domestic Patent References:

Attorney, Agent or Firm:

Keisei Nishikawa
Atsuo Mori

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