Title:
圧電素子及びその製造方法、並びにその圧電素子を備えたインクジェットヘッド、インクジェット式記録装置及び角速度センサ
Document Type and Number:
Japanese Patent JP4058018
Kind Code:
B2
Abstract:
A piezoelectric element includes a first electrode (2); a piezoelectric layered film (10) composed of a first piezoelectric film (3) formed on the first electrode film and a second piezoelectric film (4) that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film (5) formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.
Inventors:
Hideo Torii
Eiji Fujii
Ken Kamada
Satoru Fujii
Eiji Fujii
Ken Kamada
Satoru Fujii
Application Number:
JP2004127087A
Publication Date:
March 05, 2008
Filing Date:
April 22, 2004
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B41J2/045; H01L41/09; B41J2/055; B41J2/135; B41J2/14; B41J2/16; G01C19/56; G01C19/5628; H01L29/84; H01L41/08; H01L41/18; H01L41/22; H01L41/29; H01L41/316; H01L41/319; H01L41/39; H02N2/00
Domestic Patent References:
| JP2000307163A | ||||
| JP10209517A | ||||
| JP11191646A | ||||
| JP11214763A | ||||
| JP2001313429A | ||||
| JP2003046160A | ||||
| JP2000106422A | ||||
| JP2000188377A |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori