Title:
基板保持装置
Document Type and Number:
Japanese Patent JP4058482
Kind Code:
B2
Inventors:
Haruhiko Kususe
Application Number:
JP2002108972A
Publication Date:
March 12, 2008
Filing Date:
April 11, 2002
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
B23Q3/08; H01L21/683; H01L21/68
Domestic Patent References:
| JP9266242A | ||||
| JP1121932U | ||||
| JP7260455A | ||||
| JP20016998A |
Attorney, Agent or Firm:
Ken Ieiri