Title:
フォトマスクの製造方法
Document Type and Number:
Japanese Patent JP4068281
Kind Code:
B2
Inventors:
Toshi Tsuji
Application Number:
JP2000087652A
Publication Date:
March 26, 2008
Filing Date:
March 27, 2000
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G03F1/68; G03F1/84; H01L21/027
Domestic Patent References:
| JP7175204A | ||||
| JP9236906A | ||||
| JP2000075467A | ||||
| JP2000195787A | ||||
| JP2001222097A | ||||
| JP5232686A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai