Title:
炭化珪素単結晶の製造方法
Document Type and Number:
Japanese Patent JP4069508
Kind Code:
B2
Inventors:
Shoichi Onda
Takashi Onoda
Atsuto Okamoto
Naohiro Sugiyama
Takashi Onoda
Atsuto Okamoto
Naohiro Sugiyama
Application Number:
JP22109998A
Publication Date:
April 02, 2008
Filing Date:
July 21, 1998
Export Citation:
Assignee:
株式会社デンソー
International Classes:
C30B29/36
Domestic Patent References:
| JP11012100A |
Attorney, Agent or Firm:
Motomu Itou