Title:
シリコンカーバイド結晶膜の形成方法
Document Type and Number:
Japanese Patent JP4070305
Kind Code:
B2
Inventors:
Kimura
Arai Manabu
Arai Manabu
Application Number:
JP17719398A
Publication Date:
April 02, 2008
Filing Date:
June 24, 1998
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
C30B29/36; H01L21/20; H01L21/203; H01L21/205
Domestic Patent References:
| JP55104999A | ||||
| JP2001168039A |
Attorney, Agent or Firm:
Tsuneaki Nagao