To provide a device for making thin plate able to obtain a flat shape thin plate and furthermore able to optimize the shape of the obtained thin plate.
The device for making the thin plate is composed of a horizontal direction guide rail 70 extending to a horizontal direction, a horizontal moving unit 404 able to move along the horizontal direction guide rail 70, a vertical direction guide shaft 403 supported to be able to slide to a vertical direction 105 to the horizontal moving unit 404 and connected with a substrate fixing part 101 at its lower end part, a vertical direction guide rail 80 set along the horizontal direction guide rail 70 and to guide a moving position of the upper part of the vertical direction guide shaft 403, a diagonal moving guide shaft 402 supported to be able to slide to the vertical direction to the horizontal moving unit 404 and connected with a substrate fixing part 101 at its lower end part and a diagonal moving guide rail 90 set along the horizontal direction guide rail 70 and to guide the upper part of the diagonal moving guide shaft 402.
COPYRIGHT: (C)2003,JPO
Shuji Kuruma
Yano Kozaburo
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