Title:
光学部材の位置調整機構
Document Type and Number:
Japanese Patent JP4071971
Kind Code:
B2
Abstract:
To provide an optical member positioning mechanism capable of positioning an optical member with high precision with simplified structure.
A biaxial stage 18 for holding an optical member 8 is supported by three leaf springs 19, 20, 21 which are deformed or displaced in the plane of a base stage 17 so that the stage 18 is in parallel with the base stage 17 serving as the reference. One ends of the first and second springs 19, 20 are connected with the biaxial stage 18 in the directions orthogonal to each other. By displacing the springs 19, 20 in the plane of the base stage 17, the biaxial stage 18 is displaced in the same plane to adjust position of the optical member 8.
COPYRIGHT: (C)2003,JPO
Inventors:
Yoshiaki Higashikawa
Takuji Kurosumi
Takuji Kurosumi
Application Number:
JP2002022418A
Publication Date:
April 02, 2008
Filing Date:
January 30, 2002
Export Citation:
Assignee:
HORIBA, Ltd.
International Classes:
G01N15/02; G01N15/14
Domestic Patent References:
| JP5077125A | ||||
| JP2001013058A | ||||
| JP5215662A | ||||
| JP6019550A | ||||
| JP9229949A | ||||
| JP2000135833A |
Attorney, Agent or Firm:
Hideo Fujimoto