Title:
蒸着用マスク構造体とその製造方法、及びこれを用いた有機EL素子の製造方法
Document Type and Number:
Japanese Patent JP4072422
Kind Code:
B2
Abstract:
A deposition mask frame assembly, a method of manufacturing the same, and a method of manufacturing an organic electroluminescent (EL) device using the deposition mask frame assembly are provided. The deposition mask frame assembly includes a mask including a thin plate in which a predetermined pattern of apertures is formed, a frame supporting one surface of the mask so that the mask is tensed, and a cover mask supporting an opposite surface of the mask, wherein the cover mask corresponds to the frame.
Inventors:
Shigemura Kou Osamu
Application Number:
JP2002339616A
Publication Date:
April 09, 2008
Filing Date:
November 22, 2002
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
C23C14/24; C23C14/04; H05B33/10; C23C16/04; H01L51/40; H01L51/50; H05B33/14; H01L27/32
Domestic Patent References:
| JP10121241A | ||||
| JP61057903B1 | ||||
| JP10330910A | ||||
| JP2003068453A | ||||
| JP2003068454A |
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Yasuhiko Murayama
Masatake Shiga
Yasuhiko Murayama